JPH0410687Y2 - - Google Patents

Info

Publication number
JPH0410687Y2
JPH0410687Y2 JP1923485U JP1923485U JPH0410687Y2 JP H0410687 Y2 JPH0410687 Y2 JP H0410687Y2 JP 1923485 U JP1923485 U JP 1923485U JP 1923485 U JP1923485 U JP 1923485U JP H0410687 Y2 JPH0410687 Y2 JP H0410687Y2
Authority
JP
Japan
Prior art keywords
rotating shaft
moving
shaft
moving shaft
screw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1923485U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61136535U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1923485U priority Critical patent/JPH0410687Y2/ja
Publication of JPS61136535U publication Critical patent/JPS61136535U/ja
Application granted granted Critical
Publication of JPH0410687Y2 publication Critical patent/JPH0410687Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Electron Beam Exposure (AREA)
JP1923485U 1985-02-14 1985-02-14 Expired JPH0410687Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1923485U JPH0410687Y2 (en]) 1985-02-14 1985-02-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1923485U JPH0410687Y2 (en]) 1985-02-14 1985-02-14

Publications (2)

Publication Number Publication Date
JPS61136535U JPS61136535U (en]) 1986-08-25
JPH0410687Y2 true JPH0410687Y2 (en]) 1992-03-17

Family

ID=30508620

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1923485U Expired JPH0410687Y2 (en]) 1985-02-14 1985-02-14

Country Status (1)

Country Link
JP (1) JPH0410687Y2 (en])

Also Published As

Publication number Publication date
JPS61136535U (en]) 1986-08-25

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